´«¸ÐÆ÷ ´«¸ÐÆ÷£¨Ó¢ÎÄÃû³Æ£ºtransducer/sensor£©ÊÇÒ»ÖÖ¼ì²â×°Öã¬ÄܸÐÊܵ½±»²âÁ¿µÄÐÅÏ¢£¬²¢Äܽ«¸ÐÊܵ½µÄÐÅÏ¢£¬°´Ò»¶¨¹æÂɱ任³ÉΪµçÐźŻòÆäËûËùÐèÐÎʽµÄÐÅÏ¢Êä³ö£¬ÒÔÂú×ãÐÅÏ¢µÄ´«Êä¡¢´¦Àí¡¢´æ´¢¡¢ÏÔʾ¡¢¼Ç¼ºÍ¿ØÖƵÈÒªÇó¡£ ´«¸ÐÆ÷µÄÌصã°üÀ¨£ºÎ¢ÐÍ»¯¡¢Êý×Ö»¯¡¢ÖÇÄÜ»¯¡¢¶à¹¦ÄÜ»¯¡¢ÏµÍ³»¯¡¢ÍøÂ绯¡£ËüÊÇʵÏÖ×Ô¶¯¼ì²âºÍ×Ô¶¯¿ØÖƵÄÊ×Òª»·½Ú¡£´«¸ÐÆ÷µÄ´æÔںͷ¢Õ¹£¬ÈÃÎïÌåÓÐÁË´¥¾õ¡¢Î¶¾õºÍÐá¾õµÈ¸Ð¹Ù£¬ÈÃÎïÌåÂýÂý±äµÃ»îÁËÆðÀ´¡£Í¨³£¸ù¾ÝÆä»ù±¾¸ÐÖª¹¦ÄÜ·ÖΪÈÈÃôÔª¼þ¡¢¹âÃôÔª¼þ¡¢ÆøÃôÔª¼þ¡¢Á¦ÃôÔª¼þ¡¢´ÅÃôÔª¼þ¡¢ÊªÃôÔª¼þ¡¢ÉùÃôÔª¼þ¡¢·ÅÉäÏßÃô¸ÐÔª¼þ¡¢É«ÃôÔª¼þºÍζÃôÔª¼þµÈÊ®´óÀà¡£ ¶¨Òå ¹ú¼Ò±ê×¼GB7665-87¶Ô´«¸ÐÆ÷ϵĶ¨ÒåÊÇ£º¡°ÄܸÐÊܹ涨µÄ±»²âÁ¿¼þ²¢°´ÕÕÒ»¶¨µÄ¹æÂÉ(Êýѧº¯Êý·¨Ôò)ת»»³É¿ÉÓÃÐźŵÄÆ÷¼þ»ò×°Öã¬Í¨³£ÓÉÃô¸ÐÔª¼þºÍת»»Ôª¼þ×é³É¡±¡£ ÖйúÎïÁªÍøУÆóÁªÃËÈÏΪ£¬´«¸ÐÆ÷µÄ´æÔںͷ¢Õ¹£¬ÈÃÎïÌåÓÐÁË´¥¾õ¡¢Î¶¾õºÍÐá¾õµÈ¸Ð¹Ù£¬ÈÃÎïÌåÂýÂý±äµÃ»îÁËÆðÀ´¡£¡± ¡°´«¸ÐÆ÷¡±ÔÚÐÂΤʽ´ó´ÊµäÖж¨ÒåΪ£º¡°´ÓÒ»¸öϵͳ½ÓÊܹ¦ÂÊ£¬Í¨³£ÒÔÁíÒ»ÖÖÐÎʽ½«¹¦ÂÊË͵½µÚ¶þ¸öϵͳÖеÄÆ÷¼þ¡±¡£ Ö÷ÒªÌص㠴«¸ÐÆ÷µÄÌصã°üÀ¨£ºÎ¢ÐÍ»¯¡¢Êý×Ö»¯¡¢ÖÇÄÜ»¯¡¢¶à¹¦ÄÜ»¯¡¢ÏµÍ³»¯¡¢ÍøÂ绯£¬Ëü²»½ö´Ù½øÁË´«Í³²úÒµµÄ¸ÄÔìºÍ¸üл»´ú£¬¶øÇÒ»¹¿ÉÄܽ¨Á¢ÐÂÐ͹¤Òµ£¬´Ó¶ø³ÉΪ21ÊÀ¼Íеľ¼ÃÔö³¤µã¡£Î¢ÐÍ»¯Êǽ¨Á¢ÔÚ΢µç×Ó»úеϵͳ£¨MEMS£©¼¼Êõ»ù´¡Éϵģ¬Òѳɹ¦Ó¦ÓÃÔÚ¹èÆ÷¼þÉÏ×ö³É¹èѹÁ¦´«¸ÐÆ÷ µç×èÓ¦±äʽ ´«¸ÐÆ÷Öеĵç×èÓ¦±äƬ¾ßÓнðÊôµÄÓ¦±äЧӦ£¬¼´ÔÚÍâÁ¦×÷ÓÃϲúÉú»úеÐα䣬´Ó¶øʹµç×èÖµËæÖ®·¢ÉúÏàÓ¦µÄ±ä»¯¡£µç×èÓ¦±äƬÖ÷ÒªÓнðÊôºÍ°ëµ¼ÌåÁ½À࣬½ðÊôÓ¦±äƬÓнðÊô˿ʽ¡¢²Ê½¡¢±¡Ä¤Ê½Ö®·Ö¡£°ëµ¼ÌåÓ¦±äƬ¾ßÓÐÁéÃô¶È¸ß£¨Í¨³£ÊÇ˿ʽ¡¢²Ê½µÄ¼¸Ê®±¶£©¡¢ºáÏòЧӦСµÈÓŵ㡣 °´Êä³öÐźÅÄ£Äâ´«¸ÐÆ÷£º½«±»²âÁ¿µÄ·ÇµçѧÁ¿×ª»»³ÉÄ£ÄâµçÐźš£ Êý×Ö´«¸ÐÆ÷£º½«±»²âÁ¿µÄ·ÇµçѧÁ¿×ª»»³ÉÊý×ÖÊä³öÐźţ¨°üÀ¨Ö±½ÓºÍ¼ä½Óת»»£©¡£ Ö÷ÒªÌØÐÔ´«¸ÐÆ÷¾²Ì¬´«¸ÐÆ÷µÄ¾²Ì¬ÌØÐÔÊÇÖ¸¶Ô¾²Ì¬µÄÊäÈëÐźţ¬´«¸ÐÆ÷µÄÊä³öÁ¿ÓëÊäÈëÁ¿Ö®¼äËù¾ßÓÐÏ໥¹Øϵ¡£ÒòΪÕâʱÊäÈëÁ¿ºÍÊä³öÁ¿¶¼ºÍʱ¼äÎ޹أ¬ËùÒÔËüÃÇÖ®¼äµÄ¹Øϵ£¬¼´´«¸ÐÆ÷µÄ¾²Ì¬ÌØÐÔ¿ÉÓÃÒ»¸ö²»º¬Ê±¼ä±äÁ¿µÄ´úÊý·½³Ì£¬»òÒÔÊäÈëÁ¿×÷ºá×ø±ê£¬°ÑÓëÆä¶ÔÓ¦µÄÊä³öÁ¿×÷×Ý×ø±ê¶ø»³öµÄÌØÐÔÇúÏßÀ´ÃèÊö¡£±íÕ÷´«¸ÐÆ÷¾²Ì¬ÌØÐÔµÄÖ÷Òª²ÎÊýÓУºÏßÐԶȡ¢ÁéÃô¶È¡¢³ÙÖÍ¡¢Öظ´ÐÔ¡¢Æ¯ÒƵȡ£ 1.ÏßÐԶȣºÖ¸´«¸ÐÆ÷Êä³öÁ¿ÓëÊäÈëÁ¿Ö®¼äµÄʵ¼Ê¹ØϵÇúÏßÆ«ÀëÄâºÏÖ±Ïߵij̶ȡ£¶¨ÒåΪÔÚÈ«Á¿³Ì·¶Î§ÄÚʵ¼ÊÌØÐÔÇúÏßÓëÄâºÏÖ±ÏßÖ®¼äµÄ×î´óÆ«²îÖµÓëÂúÁ¿³ÌÊä³öÖµÖ®±È¡£ 2.ÁéÃô¶È£ºÁéÃô¶ÈÊÇ´«¸ÐÆ÷¾²Ì¬ÌØÐÔµÄÒ»¸öÖØÒªÖ¸±ê¡£Æ䶨ÒåΪÊä³öÁ¿µÄÔöÁ¿ÓëÒýÆð¸ÃÔöÁ¿µÄÏàÓ¦ÊäÈëÁ¿ÔöÁ¿Ö®±È¡£ÓÃS±íʾÁéÃô¶È¡£ 3.³ÙÖÍ£º´«¸ÐÆ÷ÔÚÊäÈëÁ¿ÓÉСµ½´ó£¨ÕýÐг̣©¼°ÊäÈëÁ¿ÓÉ´óµ½Ð¡£¨·´Ðг̣©±ä»¯ÆÚ¼äÆäÊäÈëÊä³öÌØÐÔÇúÏß²»ÖغϵÄÏÖÏó³ÉΪ³ÙÖÍ¡£¶ÔÓÚͬһ´óСµÄÊäÈëÐźţ¬´«¸ÐÆ÷µÄÕý·´ÐгÌÊä³öÐźŴóС²»ÏàµÈ£¬Õâ¸ö²îÖµ³ÆΪ³ÙÖͲîÖµ¡£ 4.Öظ´ÐÔ£ºÖظ´ÐÔÊÇÖ¸´«¸ÐÆ÷ÔÚÊäÈëÁ¿°´Í¬Ò»·½Ïò×÷È«Á¿³ÌÁ¬Ðø¶à´Î±ä»¯Ê±£¬ËùµÃÌØÐÔÇúÏß²»Ò»Öµij̶ȡ£ 5.ƯÒÆ£º´«¸ÐÆ÷µÄƯÒÆÊÇÖ¸ÔÚÊäÈëÁ¿²»±äµÄÇé¿öÏ£¬´«¸ÐÆ÷Êä³öÁ¿Ëæ×Åʱ¼ä±ä»¯£¬´ËÏÖÏó³ÆΪƯÒÆ¡£²úÉúƯÒƵÄÔÒòÓÐÁ½¸ö·½Ã棺һÊÇ´«¸ÐÆ÷×ÔÉí½á¹¹²ÎÊý£»¶þÊÇÖÜΧ»·¾³£¨Èçζȡ¢Êª¶ÈµÈ£©¡£ 6.·Ö±æÁ¦£ºµ±´«¸ÐÆ÷µÄÊäÈë´Ó·ÇÁãÖµ»ºÂýÔö¼Óʱ£¬ÔÚ³¬¹ýijһÔöÁ¿ºóÊä³ö·¢Éú¿É¹Û²âµÄ±ä»¯£¬Õâ¸öÊäÈëÔöÁ¿³Æ´«¸ÐÆ÷µÄ·Ö±æÁ¦£¬¼´×îСÊäÈëÔöÁ¿¡£ 7.ãÐÖµ£ºµ±´«¸ÐÆ÷µÄÊäÈë´ÓÁãÖµ¿ªÊ¼»ºÂýÔö¼Óʱ£¬ÔڴﵽijһֵºóÊä³ö·¢Éú¿É¹Û²âµÄ±ä»¯£¬Õâ¸öÊäÈëÖµ³Æ´«¸ÐÆ÷µÄãÐÖµµçѹ¡£ ´«¸ÐÆ÷¶¯Ì¬Ëùν¶¯Ì¬ÌØÐÔ£¬ÊÇÖ¸´«¸ÐÆ÷ÔÚÊäÈë±ä»¯Ê±£¬ËüµÄÊä³öµÄÌØÐÔ¡£ÔÚʵ¼Ê¹¤×÷ÖУ¬´«¸ÐÆ÷µÄ¶¯Ì¬ÌØÐÔ³£ÓÃËü¶ÔijЩ±ê×¼ÊäÈëÐźŵÄÏìÓ¦À´±íʾ¡£ÕâÊÇÒòΪ´«¸ÐÆ÷¶Ô±ê×¼ÊäÈëÐźŵÄÏìÓ¦ÈÝÒ×ÓÃʵÑé·½·¨ÇóµÃ£¬²¢ÇÒËü¶Ô±ê×¼ÊäÈëÐźŵÄÏìÓ¦ÓëËü¶ÔÈÎÒâÊäÈëÐźŵÄÏìÓ¦Ö®¼ä´æÔÚÒ»¶¨µÄ¹Øϵ£¬ÍùÍùÖªµÀÁËÇ°Õß¾ÍÄÜÍƶ¨ºóÕß¡£×î³£Óõıê×¼ÊäÈëÐźÅÓн×Ô¾ÐźźÍÕýÏÒÐźÅÁ½ÖÖ£¬ËùÒÔ´«¸ÐÆ÷µÄ¶¯Ì¬ÌØÐÔÒ²³£Óý×Ô¾ÏìÓ¦ºÍƵÂÊÏìÓ¦À´±íʾ¡£ ³£ÓÃÊõÓï1.´«¸ÐÆ÷ ÄܸÐÊܹ涨µÄ±»²âÁ¿²¢°´ÕÕÒ»¶¨µÄ¹æÂÉת»»³É¿ÉÓÃÊä³öÐźŵÄÆ÷¼þ»ò×°Öá£Í¨³£ÓÐÃô¸ÐÔª¼þºÍת»»Ôª¼þ×é³É¡£ 1.Ãô¸ÐÔª¼þÊÇÖ¸´«¸ÐÆ÷ÖÐÄÜÖ±½Ó£¨»òÏìÓ¦£©±»²âÁ¿µÄ²¿·Ö¡£ 2.ת»»Ôª¼þÖ¸´«¸ÐÆ÷ÖÐÄܽÏÃô¸ÐÔª¼þ¸ÐÊÜ£¨»òÏìÓ¦£©µÄ±»²âÁ¿×ª»»³ÉÊÇÓë´«ÊäºÍ£¨»ò£©²âÁ¿µÄµçÐźŲ¿·Ö¡£ 3.µ±Êä³öΪ¹æ¶¨µÄ±ê×¼ÐźÅʱ£¬Ôò³ÆΪ±äËÍÆ÷¡£ 2.²âÁ¿·¶Î§ ÔÚÔÊÐíÎó²îÏÞÄÚ±»²âÁ¿ÖµµÄ·¶Î§¡£ 3.Á¿³Ì ²âÁ¿·¶Î§ÉÏÏÞÖµºÍÏÂÏÞÖµµÄ´úÊý²î¡£ 4.¾«È·¶È ±»²âÁ¿µÄ²âÁ¿½á¹ûÓëÕæÖµ¼äµÄÒ»Ö³̶ȡ£ 5.Öظ´ÐÔ ÔÚËùÓÐÏÂÊöÌõ¼þÏ£¬¶Ôͬһ±»²âµÄÁ¿½øÐжà´ÎÁ¬Ðø²âÁ¿ËùµÃ½á¹ûÖ®¼äµÄ·ûºÏ³Ì¶È£º oÏàͬ²âÁ¿·½·¨ oÏàͬ¹Û²âÕß oÏàͬ²âÁ¿ÒÇÆ÷ oÏàͬµØµã oÏàͬʹÓÃÌõ¼þ oÔÚ¶ÌʱÆÚÄÚµÄÖظ´¡£ 6.·Ö±æÁ¦ ´«¸ÐÆ÷Ôڹ涨²âÁ¿·¶Î§ÄÚ¿ÉÄܼì²â³öµÄ±»²âÁ¿µÄ×îС±ä»¯Á¿¡£ 7.ãÐÖµ ÄÜʹ´«¸ÐÆ÷Êä³ö¶Ë²úÉú¿É²â±ä»¯Á¿µÄ±»²âÁ¿µÄ×îС±ä»¯Á¿¡£ 8.Áãλ ʹÊä³öµÄ¾ø¶ÔֵΪ×îСµÄ״̬£¬ÀýÈçƽºâ״̬¡£ 9.¼¤Àø Ϊʹ´«¸ÐÆ÷Õý³£¹¤×÷¶øÊ©¼ÓµÄÍⲿÄÜÁ¿£¨µçѹ»òµçÁ÷£©¡£ 10.×î´ó¼¤Àø ÔÚÊÐÄÚÌõ¼þÏ£¬Äܹ»Ê©¼Óµ½´«¸ÐÆ÷Éϵļ¤Àøµçѹ»òµçÁ÷µÄ×î´óÖµ¡£ 11.ÊäÈë×迹 ÔÚÊä³ö¶Ë¶Ì·ʱ£¬´«¸ÐÆ÷ÊäÈë¶Ë²âµÃµÄ×迹¡£ 12.Êä³ö Óд«¸ÐÆ÷²úÉúµÄÓëÍâ¼Ó±»²âÁ¿³Éº¯Êý¹ØϵµÄµçÁ¿¡£ 13.Êä³ö×迹 ÔÚÊäÈë¶Ë¶Ì·ʱ£¬´«¸ÐÆ÷Êä³ö¶Ë²âµÃµÄ×迹¡£ 14.ÁãµãÊä³ö ÔÚÊÒÄÚÌõ¼þÏ£¬Ëù¼Ó±»²âÁ¿ÎªÁãʱ´«¸ÐÆ÷µÄÊä³ö¡£ 15.Öͺó Ôڹ涨µÄ·¶Î§ÄÚ£¬µ±±»²âÁ¿ÖµÔö¼ÓºÍ¼õÉÙʱ£¬Êä³öÖгöÏÖµÄ×î´ó²îÖµ¡£ 16.³Ùºó Êä³öÐźű仯Ïà¶ÔÓÚÊäÈëÐźű仯µÄʱ¼äÑÓ³Ù¡£ 17.ƯÒÆ ÔÚÒ»¶¨µÄʱ¼ä¼ä¸ôÄÚ£¬´«¸ÐÆ÷Êä³öÖÐÓÐÓë±»²âÁ¿Î޹صIJ»ÐèÒªµÄ±ä»¯Á¿¡£ 18.ÁãµãƯÒÆ Ôڹ涨µÄʱ¼ä¼ä¸ô¼°ÊÒÄÚÌõ¼þÏÂÁãµãÊä³öʱµÄ±ä»¯¡£ 19.ÁéÃô¶È ´«¸ÐÆ÷Êä³öÁ¿µÄÔöÁ¿ÓëÏàÓ¦µÄÊäÈëÁ¿ÔöÁ¿Ö®±È¡£ 20.ÁéÃô¶ÈƯÒÆ ÓÉÓÚÁéÃô¶ÈµÄ±ä»¯¶øÒýÆðµÄУ׼ÇúÏßбÂʵı仯¡£ 21.ÈÈÁéÃô¶ÈƯÒÆ ÓÉÓÚÁéÃô¶ÈµÄ±ä»¯¶øÒýÆðµÄÁéÃô¶ÈƯÒÆ¡£ 22.ÈÈÁãµãƯÒÆ ÓÉÓÚÖÜΧζȱ仯¶øÒýÆðµÄÁãµãƯÒÆ¡£ 23.ÏßÐÔ¶È Ð£×¼ÇúÏßÓëijһ¹æ¶¨Ö±ÏßÒ»Öµij̶ȡ£ 24.·ÇÏßÐÔ¶È Ð£×¼ÇúÏßÓëijһ¹æ¶¨Ö±ÏßÆ«ÀëµÄ³Ì¶È¡£ 25.³¤ÆÚÎȶ¨ÐÔ ´«¸ÐÆ÷Ôڹ涨µÄʱ¼äÄÚÈÔÄܱ£³Ö²»³¬¹ýÔÊÐíÎó²îµÄÄÜÁ¦¡£ 26.¹ÌÓÐƵÂÊ ÔÚÎÞ×èÁ¦Ê±£¬´«¸ÐÆ÷µÄ×ÔÓÉ£¨²»¼ÓÍâÁ¦£©Õñµ´ÆµÂÊ¡£ 27.ÏìÓ¦ Êä³öʱ±»²âÁ¿±ä»¯µÄÌØÐÔ¡£ 28.²¹³¥Î¶ȷ¶Î§ ʹ´«¸ÐÆ÷±£³ÖÁ¿³ÌºÍ¹æ¶¨¼«ÏÞÄÚµÄÁãƽºâËù²¹³¥µÄζȷ¶Î§¡£ 29.Èä±ä µ±±»²âÁ¿»úÆ÷¶àÓл·¾³Ìõ¼þ±£³Öºã¶¨Ê±£¬Ôڹ涨ʱ¼äÄÚÊä³öÁ¿µÄ±ä»¯¡£ 30.¾øÔµµç×è ÈçÎÞÆäËû¹æ¶¨£¬Ö¸ÔÚÊÒÎÂÌõ¼þÏÂÊ©¼Ó¹æ¶¨µÄÖ±Á÷µçѹʱ£¬´Ó´«¸ÐÆ÷¹æ¶¨¾øÔµ²¿·ÖÖ®¼ä²âµÃµÄµç×èÖµ¡£
|